The 60th JSAP Spring Meeting,2013

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Regular sessions(Poster presentation)

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[28p-PB3-1~15] 6.2 Carbon-based thin films

Thu. Mar 28, 2013 4:00 PM - 6:00 PM PB3 (2nd gymnasium)

[28p-PB3-12] Mechanism of Film hardening of Amorphous Silicon Carbide Films

○Haruhiko Ito1, Takeshi Ohgaki1, Hiroki Akasaka1,2, Hidetoshi Saitoh1 (Nagaoka Univ. of Tech.1, Tokyo Instit. of Tech.2)

Keywords:アモルファス炭化ケイ素