[28p-PB3-1~15] 6.2 Carbon-based thin films

[28p-PB3-13] Formation of graphene and development of patterning method by the electron irradiation applied to the fullerene

^○Seiya Matsukawa¹, Kyouta Matsuo², Tmoki Imamura², Hiroshi Kubota¹ (Graduate School of Science and Technology Kumamoto University¹, Kumamoto University²)

Keywords:アモルファスカーボン、グラフェン