[28p-PB3-1~15] 6.2 Carbon-based thin films

[28p-PB3-3] ▲Single crystal diamond mechanical resonators

^○Meiyong Liao¹, Masaya Toda², Liwen Sang¹, Masataka Imura¹, Naoki Ikeda¹, Yasuo Koide¹ (National Institute for Materials Science¹, Tohoku University²)

Keywords:diamond、MEMS