[28p-PB3-1~15] 6.2 Carbon-based thin films

[28p-PB3-4] Structure optimization of p-i-p diamond FET fabricated with MWPCVD process

^○（M1）Hikaru Hayakawa¹, Osamu Maida¹, Toshimichi Ito¹ (Osaka Univ.¹)

Keywords:ダイヤモンド、ＦＥＴ、p-i-p