[29a-A3-1~7] 16.2 Processing technologies and devices

[29a-A3-3] Electrical Characteristics of Ge:Sb/a-Si Potential Barrier Structure for Infrared

Takayuki Isokawa¹, ^○Yuhei Nakamura¹, Yuta Yamada¹, Junichi Kinoshita¹, Akio Furukawa¹ (Tokyo Univ. of Science¹)

Keywords:赤外線センサ、ボロメータ、寄生抵抗