[29a-A3-1~7] 16.2 Processing technologies and devices

[29a-A3-4] Characteristics of Ge Films Inserted with Thin Si layer for Infrared Bolometer Sensor

Junichi Kinoshita¹, Ryou Takeuchi¹, Yuhei Nakamura¹, ^○Akio Furukawa¹ (Tokyo University of Science¹)

Keywords:ボロメーター、赤外線、センサー