[29a-A3-1~7] 16.2 Processing technologies and devices

[29a-A3-5] Local Area Transfer and Simultaneous Crystallization Technique of a-Si Films with Mid-Air Structure by Near-Infrared Semiconductor Diode Laser Irradiation

^○Kohei Sakaike¹, Yoshitaka Kobayashi¹, Shogo Nakamura¹, Shohei Hayashi¹, Muneki Akazawa¹, Seiji Morisaki¹, Seiichiro Higashi¹ (Hiroshima university¹)

Keywords:薄膜トランジスタ、結晶化、転写