[29a-A3-1~7] 16.2 Processing technologies and devices

[29a-A3-6] △Analysis of Degradation Phenomenon Caused by Self-Heating Effect in Amorphous Oxide Thin-Film Transistor

^○Satoshi Urakawa¹, Sigekazu Tomai², Yoshihiro Ueoka¹, Haruka Yamazaki¹, Masashi Kasami², Koki Yano², Wang Dapeng³, Mamoru Furuta³, Masahiro Horita^1,4, Yasuaki Ishikawa^1,4, Yukiharu Uraoka^1,4 (NAIST¹, Idemitsu Co., Ltd², Kochi univ. of Tech.³, CREST⁴)

Keywords:薄膜トランジスタ、酸化物半導体、発熱解析