[29a-B5-1~11] 1.9 Ultrasonic

[29a-B5-3] △Second-overtone mode resonator consisting of polarization inverted c-axis oriented ZnO mutilayer

^○Ryo Ikoma¹, Takahiko Yanagitani², Shinji Takayanagi¹, Masashi Suzuki², Hiroyuki Odagawa³, Mami Matsukawa¹ (Doshisha Univ.¹, Nagoya Inst. Tech.², Kumamoto NCT³)

Keywords:極性制御、ZnO、薄膜共振子