The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

01. Applied Physics in General » 1.9 Ultrasonic

[29a-B5-1~11] 1.9 Ultrasonic

Fri. Mar 29, 2013 9:00 AM - 12:00 PM B5 (K2 4F-1401)

[29a-B5-2] △Rayleigh mode SAW with high electromechanical coupling in c-axis tilted ZnO or ScAlN film

○Yoshiya Kato1, Takahiko Yanagitani2, Shinji Yakayanagi1, Kosuke Imamura1, Mami Matsukawa1 (Doshisha Univ.1, Nagoya Inst. Tech2)

Keywords:Rayleigh SAW、ZnO薄膜、弾性表面波