[29a-B8-1~10] 8.2 Plasma measurements and diagnostics

[29a-B8-6] Measurement of Sapphire Substrate Temperature Using Frequency Domain Low Coherence Interferometer (Ⅱ)

^○takayoshi tsutsumi¹, keigo takeda¹, kenji ishikawa¹, hiroki kondo¹, takayuki ohta², masafumi ito², makoto sekine¹, masaru hori¹ (Nagoya University¹, Meijo University²)

Keywords:温度計測