The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

04. Quantum Electronics » 4.7 Laser processing

[29a-D2-1~9] 4.7 Laser processing

Fri. Mar 29, 2013 9:30 AM - 12:00 PM D2 (C5 3F-5310)

[29a-D2-8] Diamond-Like Carbon Etching by Laser Produced Xe Plasma

○Sho Amano1 (Univ.of Hyogo LASTI1)

Keywords:DLC、laser plasma、etching