[29a-D2-1~9] 4.7 Laser processing

[29a-D2-9] Micromachining of PMMA Using Laser Plasma Soft X-Rays for Microfabrication of 3D Molds in a Micrometer Scale

^○Nobuhiko Sugiura¹, Shuichi Torii¹, Tetsuya Makimura¹, Kouta Okazaki², Daisuke Nakamura², Akihiko Takahashi³, Tatsuo Okada², Hiroyuki Niino⁴, Kouichi Murakami¹ (Inst. of Appl. Phys., Univ. of Tsukuba¹, Grad. Sch. of ISEE, Kyushu Univ.², Grad. Sch. of Medical Sciences, Kyushu Univ.³, AIST⁴)

Keywords:レーザープラズマ軟X線、PMMA、金型