[29a-F2-1~11] 6.3 Oxide-based electronics

[29a-F2-8] △Recovery of Etching Damage by Soft X-ray Irradiation Observed in XAS spectra of TiO2 Thin Film Ⅰ

^○keiji Sano¹, Masahito Niibe¹, Takuya Kotaka¹, Retsuo Kawakami², Kikuo Tominaga², Yoshitaka Nakano³ (University of Hyogo¹, The University of Tokushima², Chubu University³)

Keywords:酸化チタン、XAS、エッチング