[29a-G19-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[29a-G19-8] Conductivity of SnO₂:Sb Thin Films by Metal Organic Decomposition Method

^○（M1）Go Kageyama¹, Hideki Yoshioka², Shin-ichi Yamamoto¹ (Ryukoku Univ.¹, Hyogo Pref. Inst. of Tech.²)

Keywords:透明導電膜、酸化スズ、SnO2