[29a-G19-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[29a-G19-9] High-Infrared Transparency of Iron-Doped Indium Saving ITO Sputtered Thin Films

^○Makoto Ohtsuka^1,2, Takashi Nakamura^1,2 (IMRAM, Tohoku Univ.¹, NICHe, Tohoku Univ.²)

Keywords:透明導電酸化物、ITO