The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[29a-G21-1~11] 15.4 III-V-group nitride crystals

Fri. Mar 29, 2013 9:00 AM - 12:00 PM G21 (B5 4F-2405)

[29a-G21-4] Tensile strain induced formation of micro-cracks for AlGaN/GaN HEMT structures

Junji Kotani1, Shuichi Tomabechi1, Toyoo Miyajima1, Norikazu Nakamura1, Toshihide Kikkawa1, Keiji Watanabe1, Kenji Imanishi1 (Fujitsu Lab.1)

Keywords:MOVPE、AlGaN/GaN、マイクロクラック