[29a-G6-1~12] 13.1 Basic properties and their evaluation

[29a-G6-11] ▲Edge Enhancement of Photo-Current in Si Stripes Measured by Multimode SPM

^○Leonid Bolotov^1,2, Vladimir Poborchii², Tetsuya Tada², Toshihiko Kanayama² (Univ. of Tsukuba¹, AIST²)

Keywords:フォトキャリヤー、半導体、ﾌﾟﾛｰﾌﾞ顕微鏡