[29a-G6-1~12] 13.1 Basic properties and their evaluation

[29a-G6-4] Electron Emission Mechanism of Si-Nanocrystals/Si-Nanocolumnar Structures as Evaluated by Non-contact Conductive Atomic Force Microscopy

^○（M1）Daichi Takeuchi¹, Katsunori Makihara¹, Mitsuhisa Ikeda², Seiichi Miyazaki¹, Hirokazu Kaki³, Tsukasa Hayashi³ (Nagoya Univ.¹, Hiroshima Univ.², NISSIN ELECTRIC Co. Ltd.³)

Keywords:電子放出、柱状Si