Temperature Dependence of Electrical Conductivity of Phosphorus-Doped Si Films after Blue-Multi-Laser-Diode Annealing

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.1 Basic properties and their evaluation

Fri. Mar 29, 2013 9:00 AM - 12:15 PM G6 (B5 1F-2106)

^○Takuma Nishinohara¹, Satoshi Chinen¹, Tatsuya Okada¹, Takashi Noguchi¹ (Univ. of the Ryukyus¹)

Keywords:BLDA、スパッタ