[29a-G6-1~12] 13.1 Basic properties and their evaluation

[29a-G6-8] Observation of Deuterium Distribution in Silicon by Atom Probe Tomography

^○（P）Hisashi Takamizawa¹, Katsuya Hoshi¹, Yasuo Shimizu¹, Koji Inoue¹, Fumiko Yano^1,2, Shinji Nagata¹, Tatsuo Shikama¹, Yasuyoshi Nagai¹ (IMR Tohoku Univ.¹, Tokyo City Univ.²)

Keywords:atom probe、3次元アトムプローブ