[29a-G7-2] Lift-off patterning of thermoelectric thick films using heat resistant mask
Keywords:厚膜、熱電膜、厚膜パターニング
Presentation information
Regular sessions(Oral presentation)
22. Joint Session L » 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"
[29a-G7-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"
Fri. Mar 29, 2013 9:00 AM - 12:00 PM G7 (B5 2F-2201)