[29a-G7-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29a-G7-9] Study on property of micromachined ultrasound transducer with PZT thin film

^○Takatsugu Wada¹, Katsuya Yamamoto¹, Akihiro Mukaiyama², Takamichi Fujii² (FF Medical R&D¹, FF Inkjet Lab²)

Keywords:超音波探触子、MEMS、PZT薄膜