[29a-G7-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29a-G7-8] ▲Analysis of Microbolometer Operation by Electro-thermal Circuit Simulation

^○Ajay Tiwari¹, Hiroaki Satoh¹, Makoto Aoki¹, Masanori Takeda¹, Norihisa Hiromoto¹, Hiroshi Inokawa¹ (Shizuoka Univ.¹)

Keywords:ボロメータ、電気的熱的シミュレーション