[29a-G9-1~11] 13.6 Silicon devices / Integration technology

[29a-G9-5] △Demonstration of planer type InGaAs TFETs with Zn diffusion by spin-on-glass technology

^○（M2）Munetaka Noguchi¹, SangHyeon Kim¹, Masashi Yokoyama¹, Osamu Ichikawa², Takaki Osada², Masahiko Hata², Mitsuru Takenaka¹, Shinichi Takagi¹ (The University of Tokyo¹, Sumitomo Chemical Co.Ltd.²)

Keywords:トンネルFET、InGaAs、プレーナ型