[29a-PB7-1~21] 15.3 III-V-group epitaxial crystals

[29a-PB7-13] Easy patterning of graphene mask and its application to selective growth of GaAs

^○（M1）Yujiro Hirota¹, Yuya Shirai¹, Hiromu Iha¹, Takenori Iwatsuki¹, Hironao Kato¹, Nao Yamamoto¹, Shigeya Naritsuka¹, Takahiro Maruyama¹ (Meijo Univ.¹)

Keywords:GaAs、MBE