[29p-A3-1~6] 16.2 Processing technologies and devices

[29p-A3-2] Influences of amorphous precursors for solid phase crystal growth of germanium on crystalline silicon (2)

^○Yuji Kojima¹, Mikuri Kanai², Tomoaki Yamaguchi², Masao Isomura¹ (Tokai Univ. Dept. Engineering¹, Tokai Univ. Graduate School of Engineering²)

Keywords:固相成長、結晶Si、非晶質Ge