[29p-B1-1~20] 7.4 Nanoimprint

[29p-B1-14] Study on the effect of additives in repeated UV nanoimprint demolding

^○Shuso Iyoshi^1,2, Makoto Okada^1,2, Yuichi Haruyama^1,2, Shinji Matsui^1,2, Masaru Nakagawa^2,3, Hiroshi Hiroshima^2,4 (Univ. of Hyogo¹, JST-CREST², Tohoku Univ.³, AIST⁴)

Keywords:UVナノインプリント、界面活性剤、離型層