[29p-B1-1~20] 7.4 Nanoimprint

[29p-B1-15] Depth profile analysis of UV nanoimprint resin with fluorine additive by X-ray photoelectron spectroscopy

^○（B）Takahiro Oyama^1,3, Makoto Okada^1,3, Shuso Iyoshi^1,3, Yuichi Haruyama^1,3, Hiroto Miyake², Tomoya Mizuta², Shinji Matsui^1,3 (Univ. of Hyogo¹, Daicel², JST-CREST³)

Keywords:ナノインプリント、レジスト、フッ素