[29p-B1-1~20] 7.4 Nanoimprint

[29p-B1-16] Simulation Study on De-molding Process in NIL

^○Takahiro Shiotus^1,2, Naoki Nishikura^1,2, Masaaki Yasuda^1,2, Hiroaki Kawata^1,2, Yoshihiko Hirai^1,2 (Osaka Pref. Univ.¹, JST-CREST²)

Keywords:離型、応力、ロール