△Ag wiring pattern formation by thermal nanoimprint technology

Presentation information

Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Fri. Mar 29, 2013 1:30 PM - 6:45 PM B1 (K2 3F-1301)

^○Hiroyuki Tambo¹, Takashi Daimon², Tatsunori Kakuda¹, Yoshiyuki Yokoyama¹, Yuichi Sakai¹, Tomoaki Futakuchi¹ (TITC¹, HDK²)

Keywords:ナノインプリント、ナノ粒子、パターン