The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[29p-B1-1~20] 7.4 Nanoimprint

Fri. Mar 29, 2013 1:30 PM - 6:45 PM B1 (K2 3F-1301)

[29p-B1-7] Fabrication of Ordered Structures by Nanoimprinting Using Anodic Porous Alumina

Takashi Yanagishita1,2, Kazuyuki Nishio1,2, Hideki Masuda1,2 (Tokyo Metropolitan Univ.1, KAST2)

Keywords:ナノインプリント、陽極酸化ポーラスアルミナ