The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[29p-B2-1~18] 7.6 Ion beams

Fri. Mar 29, 2013 1:30 PM - 6:15 PM B2 (K2 3F-1302)

[29p-B2-10] △Magnetic Property of the CoFe Film With Gas Cluster Ion Beam

○（M1）Akihiro Fujimoto1, Asahi Kimura1, Noriaki Toyoda1, Isao Yamada1 (Hyogo Univ.1)

Keywords:ガスクラスターイオンビーム、MRAM