[29p-B2-1~18] 7.6 Ion beams

[29p-B2-11] △Evaluation of surface condition of MRAM material after gas cluster ion beam etching

^○Ryo Hinoura¹, Akira Yamaguchi¹, Noriaki Toyoda¹, Kenichi Hara², Isao Yamada¹ (Hyougo univ.¹, Tokyo Electron²)

Keywords:ガスクラスターイオンビーム