The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[29p-B2-1~18] 7.6 Ion beams

Fri. Mar 29, 2013 1:30 PM - 6:15 PM B2 (K2 3F-1302)

[29p-B2-6] The Application and High-Speed of Imaging Mass Spectrometry with Swift Heavy Ion

Sho Shitomoto1, Toshio Seki1,2, Takaaki Aoki1,2, Jiro Matsuo1,2 (Kyoto Univ.1, JST-CREST2)

Keywords:MeV-SIMS