The 60th JSAP Spring Meeting,2013

Presentation information

Symposium(Oral presentation)

Symposium » ・Frontiers of process technology for Si-related thin films

[29p-B8-1~10] Frontiers of process technology for Si-related thin films

Fri. Mar 29, 2013 1:30 PM - 5:45 PM B8 (K2 4F-1406)

[29p-B8-10] Photon energy dependence of boron activation by soft X-ray irradiation

Akira Heya1, Takuto Fukuoka1, Naoto Matsuo1, Kazuhiro Kanda2, Takashi Noguchi3 (Dept. Mat. Sci. and Chem. Univ. of Hyogo1, LASTI Univ. of Hyogo2, The Univ. of Ryukyu3)

Keywords:低温活性化、軟X線、ホウ素