[29p-B8-9] Low-temperature formation of poly-Ge1-xSnx by underwater laser annealing
Keywords:Ge、Sn、laser anneal
Symposium(Oral presentation)
Symposium » ・Frontiers of process technology for Si-related thin films
Fri. Mar 29, 2013 1:30 PM - 5:45 PM B8 (K2 4F-1406)
Keywords:Ge、Sn、laser anneal