[29p-B8-1~10] Frontiers of process technology for Si-related thin films

[29p-B8-3] Si thin films by solution process and their application for electronics devices

^○Tatsuya Shimoda^1,2,3, Takashi Masuda^1.2, Yasuo Matsuki^2,4 (JAIST¹, JST-ERATO², JST-ALCA³, JSR⁴)

Keywords:液体シリコン、シクロペンタシラン、Si TFT