[29p-B8-1~10] Frontiers of process technology for Si-related thin films

[29p-B8-4] Metal-Induced Crystallization of SiGe on Insulator

^○Taizoh Sadoh¹, Jong-Hyeok Park^1,2, Masashi Kurosawa^1,2, Kaoru Toko^1,3, Masanobu Miyao¹ (Kyushu Univ.¹, JSPS², Univ. Tsukuba³)

Keywords:SiGe