[29p-B8-1~10] Frontiers of process technology for Si-related thin films

[29p-B8-6] Thickening of Si system materials by high speed sputtering epitaxy and its application to solar cells

^○wenchang yeh¹ (Shimane Univ.¹)

Keywords:シリコン，ゲルマニウム，スパッタ，太陽電池，膜