△Behavior of Sputtering Gas in Si Films by Blue-Multi-Laser-Diode Annealing

Presentation information

Symposium(Oral presentation)

Symposium » ・Frontiers of process technology for Si-related thin films

Fri. Mar 29, 2013 1:30 PM - 5:45 PM B8 (K2 4F-1406)

^○Takuma Nishinohara¹, Satoshi Chinen¹, Tatsuya Okada¹, Takashi Noguchi¹ (Univ. of the Ryukyus¹)

Keywords:スパッタ、BLDA、EDX