[29p-F1-1~17] 6.4 New thin-film materials

[29p-F1-8] Preparation of SnO₂ films by coplanar type surface discharge under magnetic field

Toshimichi Hanai¹, Masahiko Iyoda¹, Keigo Nabeta¹, ^○Masayuki Okuya¹ (Shizuoka Univ.¹)

Keywords:沿面放電、酸化スズ、プラズマ