[29p-F1-1~17] 6.4 New thin-film materials

[29p-F1-9] Preparation of SnO₂ thin films by surface discharge technique at room temperature under atmospheric pressure

^○Masato Tan¹, Toshimichi Hanai¹, Masahiko Iyoda¹, Masayuki Okuya¹ (Shizuoka Univ.¹)

Keywords:沿面放電、酸化スズ、プラズマ