[29p-F2-1~19] 6.3 Oxide-based electronics

[29p-F2-3] Fabrication of Si-Ti Gradient Composition Thin Films using a Hybrid Facing-target Sputtering System

^○Shinichi Morohashi¹, Hiroyuki Kuzuo¹, Tomoyuki Okada¹, Kengo Kishimoto¹, Naoyuki Harada¹ (Yamaguchi Univ.¹)

Keywords:ハイブリッド対向スパッタ、傾斜型組成薄膜、Sputtering