[29p-G12-1~21] 17.1 Growth technology

[29p-G12-18] ▼Large Area Plasma-Enhanced Chemical Vapor Deposition of Nanocrystalline Graphene on Insulating Substrates

^○Marek Schmidt¹, Cigang Xu², Mike Cook², Hiroshi Mizuta^1,3, Harold Chong³ (JAIST¹, Oxford Instruments², Univ. of Southampton³)

Keywords:Graphene、PECVD