[29p-G12-1~21] 17.1 Growth technology

[29p-G12-21] Plasma CVD using He for Graphene

^○Kazuo Tsugawa¹, Ryuichi Kato¹, Takatoshi Yamada^1,2, Masataka Hasegawa^1,2 (TASC¹, AIST²)

Keywords:Graphene、CVD、He