[29p-G16-1~21] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[29p-G16-1] Objection to a Simulation for Intrinsic Point Defects in Silicon Crystals during Melt Growth

^○Takao Abe¹, Toru Takaha¹, Koun Shirai² (Shinetsu Handotai¹, Osaka Univ.²)

Keywords:シリコン結晶中の点欠陥