[29p-G16-1~21] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[29p-G16-17] △First-Principles Analysis on Interaction of Dopant and Contamination Metal Atoms in Ge Crystals

^○（M1）Tatsunori Yamato¹, Koji Sueoka¹, Takahiro Maeta² (Okayama Pref. Univ.,Dept. of System Engineering¹, GlobalWafers Japan Co.,Ltd.²)

Keywords:第一原理解析、ドーパント、Ge