[29p-G16-1~21] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[29p-G16-21] The evaluation of proton irradiated GaN by thermally stimulated current

^○Tsukasa Nakamura¹, Takahiro Ida¹, Kazuma Kamioka¹, Kazuo Kuriyama¹, kazumasa Kushida² (Hosei Univ.¹, Osaka kyoiku Univ.²)

Keywords:窒化ガリウム、プロトン照射