[29p-G16-1~21] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[29p-G16-3] An investigation of the effect of thermal stress on defect formation in crystal growth of silicon from melt

^○Koun Shirai¹, Takao Abe² (ISIR, Osaka Univ.¹, Shin-Etsu Handoutai²)

Keywords:熱応力、格子欠陥形成